ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,500,104, issued on Dec. 16, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Flow supply apparatus and supply method" was invented by Sung Ho Lee (Chungcheongnam-do, South Korea) and No Jae Park (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a flow supply apparatus and supply method. The flow supply apparatus, comprising: a rail; a transport unit disposed on the rail, where an object is loaded; and a gas treatment unit provided on the transport unit and configured to purge the object. The object includes a FOUP with a substrate accommodated therein, and fume is removed from the substrate through the purg...