US Patent Issued to SEMES on Dec. 16 for "Edge exposure apparatus and light source output control method" (South Korean Inventors)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,498,642, issued on Dec. 16, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Edge exposure apparatus and light source output control method" was invented by Kwang Ryul Kim (Suwon-si, South Korea) and Gil Soo Eun (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides an edge exposure apparatus for performing an edge exposing process by irradiating a light at an edge region of a substrate. The edge exposure apparatus includes a support unit configured to support the substrate; a light irradiation unit having a light source for irradiating the light on the substrate; and a control unit config...