US Patent Issued to SEMES on Dec. 16 for "Apparatus for inspecting droplet and substrate processing apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,500,096, issued on Dec. 16, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Apparatus for inspecting droplet and substrate processing apparatus including the same" was invented by Young Jun Son (Chungcheongnam-do, South Korea), Young Un Yun (Chungcheongnam-do, South Korea) and Sung Chul Jung (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for inspecting a chemical solution of the present invention comprises a base unit having an inlet, through which a chemical solution is introduced, a flow path unit, in which the chemical solution introduced through the inlet is moved while a velocity of its...