ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,381,097, issued on Aug. 5, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Substrate treating apparatus" was invented by Ji Hoon Jeong (Hwaseong-si, South Korea), Won-Geun Kim (Goyang-si, South Korea), Young Dae Chung (Incheon, South Korea), Tae Shin Kim (Suwon-si, South Korea) and Jee Young Lee (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a substrate treating apparatus. The substrate treating apparatus includes a support unit that supports a substrate, and a laser unit that irradiates a laser beam to the substrate supported by the support unit, the laser unit includes an irradiat...