US Patent Issued to SEMES on Aug. 26 for "Apparatus for transporting substrate and system for treating substrate with the apparatus" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,400,886, issued on Aug. 26, was assigned to SEMES Co. LTD (Chungcheongnam-Do, South Korea).

"Apparatus for transporting substrate and system for treating substrate with the apparatus" was invented by Sun Ho Ha (Gyeongsangnam-do, South Korea) and Duk Hyun Son (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a substrate transporting apparatus capable of preventing an increase in temperature of a transporting robot by installing a cooling plate around the transporting robot, and a substrate treating system including the same. The substrate transporting apparatus includes a transporting unit for transporting a subs...