ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,316, issued on Aug. 12, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Semiconductor manufacturing facility and teaching method of semiconductor manufacturing facility" was invented by Seung Won Kim (Yongin-si, South Korea), Ji Soo Park (Hwaseong-si, South Korea), Jun Cheol Park (Suwon-si, South Korea) and Yong Hun Sim (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are a semiconductor manufacturing facility and a teaching method of the semiconductor manufacturing facility, which prevent partial whitening of image information for obtaining a teaching reference point of a teaching target during a te...