US Patent Issued to SEMES on April 8 for "Apparatus for treating substrate and temperature control method" (South Korean Inventors)

ALEXANDRIA, Va., April 9 -- United States Patent no. 12,272,569, issued on April 8, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Apparatus for treating substrate and temperature control method" was invented by Sang Min Lee (Seoul, South Korea), Young Hun Lee (Cheonan-si, South Korea) and Myung Seok Cha (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a temperature controlling method. The temperature controlling method for controlling a temperature of a tank storing a treating fluid transferred to the chamber, comprises supplying the treating fluid to the inner space of the tank, heating the treating fluid at the inner space, and transferring the ...