ALEXANDRIA, Va., April 9 -- United States Patent no. 12,269,057, issued on April 8, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Apparatus and method for processing substrate" was invented by Young Kyu Oh (Chungcheongnam-do, South Korea), Jung Soo Lee (Chungcheongnam-do, South Korea), Chung Oh Hong (Daejeon, South Korea) and Chang Hwa Jeong (Chungcheongnam-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a substrate is provided. The apparatus includes: a levitation stage transferring a substrate in a first direction and including first areas and second areas, which are arranged in a second direction that is different from the first direction; a p...