US Patent Issued to SEMES on April 22 for "Substrate treating apparatus and substrate treating method using the same" (South Korean Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,510, issued on April 22, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Substrate treating apparatus and substrate treating method using the same" was invented by Sang Oh Kim (Seoul, South Korea) and Myung Jin Lee (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a substrate treating apparatus having improved efficiency and productivity. The substrate treating apparatus of the present disclosure comprises a process chamber having a treating space therein, a transfer robot comprising a robot hand for loading and unloading a substrate into and out of the treating space and grippi...