US Patent Issued to SEMES on April 15 for "Support unit, substrate treating apparatus including the same, and substrate treating method" (South Korean Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,278,121, issued on April 15, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Support unit, substrate treating apparatus including the same, and substrate treating method" was invented by Kangseop Yun (Cheonan-si, South Korea), Seung Hoon Oh (Cheonan-si, South Korea), Ye Jin Choi (Seoul, South Korea), Youngil Lee (Cheonan-si, South Korea), Byungsun Bang (Hwaseong-si, South Korea), Jungbong Choi (Suwon-si, South Korea) and Gui Su Park (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a support unit for supporting a substrate. The support unit includes a support plate that has an interio...