ALEXANDRIA, Va., June 5 -- United States Patent no. 12,276,684, issued on April 15, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Method and apparatus for determining cable length for plasma processing equipment" was invented by Tae Hoon Jo (Seoul, South Korea), Hyo Seong Seong (Changwon-si, South Korea), Ji Hyun Kim (Ansan-si, South Korea) and Ja Myung Gu (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed are a method and an apparatus for determining a cable length for plasma processing equipment. More particularly, proposed is a method of determining a length of a power supply cable for plasma processing equipment that performs plasma processing through power supp...