ALEXANDRIA, Va., June 5 -- United States Patent no. 12,278,128, issued on April 15, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Apparatus for transferring substrate, and apparatus and method for treating substrate" was invented by Jinwoo Jung (Seoul, South Korea) and Yong Hee Lee (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for treating a substrate is provided. The apparatus for treating the substrate includes a first process chamber to perform a liquid treatment process with respect to the substrate, a second process chamber to perform a drying treatment process with respect to the substrate which is liquid treated in the first process chamber, a first ...