US Patent Issued to SEMES, SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION on June 3 for "Bubble measurement unit, substrate treating apparatus including the same, and bubble measurement method" (South Korean Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,320,735, issued on June 3, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea) and SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION (Seoul, South Korea).

"Bubble measurement unit, substrate treating apparatus including the same, and bubble measurement method" was invented by Jung Suk Goh (Hwaseong-si, South Korea), A Rah Cho (Daejeon, South Korea), Hyungmin Park (Seoul, South Korea), Linfeng Piao (Incheon, South Korea), Jubeom Lee (Gimpo-si, South Korea) and Jungjin Lee (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept relates to an apparatus for treating a substrate. The apparatus includes a liquid supply unit that s...