ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,480,969, issued on Nov. 25, was assigned to SEIKO EPSON Corp. (Japan).
"Physical quantity sensor and inertial measurement unit" was invented by Satoru Tanaka (Chino, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A physical quantity sensor includes a fixed portion, a support beam, a movable body, and a first fixed electrode group. The movable body is coupled to the other end of the support beam, and the first fixed electrode group is provided at a substrate and arranged in a first direction of the support beam. The movable body includes a first coupling portion, a first base portion, and a first movable electrode group. The first movable electrode...