US Patent Issued to SEIKO EPSON on March 18 for "MEMS device, liquid ejecting head, and liquid ejecting apparatus" (Japanese Inventors)

ALEXANDRIA, Va., March 19 -- United States Patent no. 12,251,936, issued on March 18, was assigned to SEIKO EPSON Corp. (Japan).

"MEMS device, liquid ejecting head, and liquid ejecting apparatus" was invented by Motoki Takabe (Shiojiri, Japan) and Yu Shiozawa (Shiojiri, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS device includes a first substrate 22 including a single-crystal silicon substrate and a second substrate 23 including a single-crystal silicon substrate, in which the first substrate 22 and the second substrate 23 are laminated together, and the first substrate 22 and the second substrate 23 are joined to each other such that the cleavage directions of both substrates intersect each ...