ALEXANDRIA, Va., June 19 -- United States Patent no. 12,332,054, issued on June 17, was assigned to SEIKO EPSON Corp. (Japan).
"Laser interferometer" was invented by Kohei Yamada (Shiojiri, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A laser interferometer includes a laser light source, a collimator generating collimated light, an optical modulator modulating the collimated light into reference light having a different frequency, and a light receiving element receiving object light and the reference light and outputting a light receiving signal. An optical axis of the collimated light is a first optical axis. When return light is generated, an optical axis of the return light is a second optical axi...