ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,542,531, issued on Feb. 3, was assigned to SEIKO EPSON Corp. (Japan).
"Method for manufacturing vibration element" was invented by Shigeru Shiraishi (Ina, Japan), Hiyori Sakata (Minowa, Japan), Keiichi Yamaguchi (Ina, Japan) and Ryuta Nishizawa (Nagano, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a vibration element includes, a base film forming step of forming a first base film at a first substrate surface of a quartz crystal substrate in first and second vibrating arm forming regions, a protective film forming step of forming a first protective film in a bank portion forming region of the first base film, and a dry-e...