ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,546,655, issued on Feb. 10, was assigned to SEIKO EPSON Corp. (Japan).
"Interferometer" was invented by Kohei Yamada (Shiojiri, Japan) and Tetsuro Matsumoto (Chino, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An interferometer including an analysis unit and a length measurement unit, wherein the analysis unit includes an analysis optical system that includes a first light source configured to emit an analysis light, a moving mirror that reflects the analysis light, and a first light receiving element that receives the analysis light, and is used for analysis of the sample using interference of the analysis light, and a mirror drive unit that dr...