ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,414, issued on Sept. 9, was assigned to SCREEN Holdings Co. Ltd. (Japan).
"Peripheral processing method" was invented by Joji Kuwahara (Kyoto, Japan) and Mitsuya Kusuhara (Kyoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "Inclination identifying information for identifying inclination of a substrate with respect to a reference plane is detected. Based on the detected inclination identifying information and a first angle, a holding position of the substrate held by a rotation holder is corrected in a direction that is in parallel to the reference plane such that a distance between a portion of the substrate that is to be processed by a per...