ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,431,369, issued on Sept. 30, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).
"Substrate processing apparatus" was invented by Shuhei Nemoto (Kyoto, Japan), Kazuhiro Shoji (Kyoto, Japan) and Ryo Muramoto (Kyoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "This invention includes a substrate holder provided rotatably about an axis of rotation extending in a vertical direction while sucking and holding a central part of a lower surface of a substrate, a rotating mechanism for outputting a rotational driving force for rotating the substrate holder, a processing mechanism for processing the substrate by supplying a processing liquid to the substr...