US Patent Issued to SCREEN Holdings on Oct. 21 for "Substrate processing apparatus, teaching information generation method, teaching set, and substrate jig" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,387, issued on Oct. 21, was assigned to SCREEN Holdings Co. Ltd. (Japan).

"Substrate processing apparatus, teaching information generation method, teaching set, and substrate jig" was invented by Daiichi Kitagishi (Kyoto, Japan) and Hiroshi Horiguchi (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In a substrate processing apparatus, when a hand located above a substrate holder holds a substrate jig having a lower surface provided with three photosensors that are arranged nonlinearly, a substrate rotation mechanism rotates the substrate holder to form a circular rotation trajectory of a mark provided in advance on the substrate holder. ...