US Patent Issued to SCREEN Holdings on Nov. 25 for "Substrate processing system and group management device" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,479,011, issued on Nov. 25, was assigned to SCREEN Holdings Co. Ltd. (Japan).

"Substrate processing system and group management device" was invented by Ryuichi Kimura (Kyoto, Japan), Naruhisa Miyazaki (Kyoto, Japan) and Hiroakira Matsui (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system includes substrate processing apparatuses and a group management device. The substrate processing apparatuses each include a plan creating section. The plan creating section creates a plan indicating a timing when a processing liquid is used and a flow rate of the processing liquid. The processing liquid is supplied to the substrat...