US Patent Issued to SCREEN HOLDINGS on Nov. 18 for "Learning device, information processing apparatus, substrate processing device, substrate processing system, learning method, recipe determination method and non-transitory computer-readable medium storing learning program" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,475,386, issued on Nov. 18, was assigned to SCREEN HOLDINGS Co. LTD. (Kyoto, Japan).

"Learning device, information processing apparatus, substrate processing device, substrate processing system, learning method, recipe determination method and non-transitory computer-readable medium storing learning program" was invented by Yosuke Hanawa (Kyoto, Japan), Yuta Sasaki (Kyoto, Japan) and Shogo Kunieda (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A learning device includes a hardware processor, wherein the hardware processor acquires a film thickness of a solid or a liquid formed on the substrate by driving a substrate processing device under...