US Patent Issued to SCREEN Holdings on July 15 for "Method for producing liquid containing sublimable substance, substrate drying method, and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,167, issued on July 15, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Method for producing liquid containing sublimable substance, substrate drying method, and substrate processing apparatus" was invented by Masayuki Otsuji (Kyoto, Japan), Naozumi Fujiwara (Kyoto, Japan) and Yuta Sasaki (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A sublimable substance is selected on the basis of whether the surface of a pattern is hydrophilic or hydrophobic. In cases where the surface of a pattern is hydrophilic, a solvent for hydrophilic cases is selected, said solvent having lower solubility in water than the selected sublimable subst...