ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,521,753, issued on Jan. 13, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).
"Substrate processing apparatus" was invented by Jun Komori (Kyoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A development device includes a casing, an airflow former and a substrate holding device. The airflow former forms a downward flow of clean air in the inner space of the casing. The development device further includes a plurality of nozzles and a partition mechanism. The plurality of nozzles supply a processing liquid to a substrate held by the substrate holding device. The partition mechanism partitions the inner space of the casing into a processing space ...