ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,342, issued on Dec. 30, was assigned to SCREEN Holdings Co. Ltd. (Japan).
"Substrate treating apparatus" was invented by Jun Sawashima (Kyoto, Japan), Takahiro Yamaguchi (Kyoto, Japan), Saki Miyagawa (Kyoto, Japan) and Kenji Kobayashi (Kyoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate treating apparatus includes a treatment housing, a holder, and a liquid supplying unit. The holder is accommodated in the treatment housing. The holder holds a substrate. The liquid supplying unit is accommodated in the treatment housing. The liquid supplying unit supplies a treating liquid to the substrate held by the holder. The substrate treati...