US Patent Issued to SCREEN Holdings on April 8 for "Substrate processing method and substrate processing device" (Japanese Inventor)

ALEXANDRIA, Va., April 9 -- United States Patent no. 12,269,068, issued on April 8, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Substrate processing method and substrate processing device" was invented by Yukifumi Yoshida (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing method that includes a processing liquid supplying step which supplies a processing liquid to a surface of a substrate, a processing film forming step in which the processing liquid on the surface of the substrate is solidified or cured to form a processing film that holds removal objects present on the surface of the substrate, and a removing step in which a removing liquid is supplied to the ...