US Patent Issued to SCREEN Holdings on April 15 for "Substrate holder state detection device and substrate holder state detection method" (Japanese Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,278,083, issued on April 15, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Substrate holder state detection device and substrate holder state detection method" was invented by Yuji Okita (Kyoto, Japan), Hideji Naohara (Kyoto, Japan), Hiroaki Kakuma (Kyoto, Japan), Tatsuya Masui (Kyoto, Japan) and Yuichi Deba (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A state detection device includes at least one chuck pin for holding a substrate, a photographing unit configured to photograph the chuck pin, and set at least one image to be obtained as a target image, a matching coordinate calculation unit, namely a data matching calculator, ...