US Patent Issued to SCREEM Holdings on July 15 for "Substrate processing apparatus and method of machining tubular guard" (Japanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,358,015, issued on July 15, was assigned to SCREEM Holdings Co. Ltd. (Kyoto, Japan).

"Substrate processing apparatus and method of machining tubular guard" was invented by Takahiro Yamaguchi (Kyoto, Japan), Jun Sawashima (Kyoto, Japan), Toru Endo (Kyoto, Japan) and Rikuta Aoki (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus includes a rotational holding member that rotates a substrate around a predetermined rotational axis while holding the substrate, a liquid supply member that supplies a liquid to the substrate held by the rotational holding member, and a resin-made tubular guard that surrounds the substra...