US Patent Issued to Sandisk Technologies on Sept. 16 for "Systems and methods for non-destructive inspection of semiconductor devices using reflective X-ray microscope tomographic imaging" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,416,589, issued on Sept. 16, was assigned to Sandisk Technologies Inc. (Milpitas, Calif.).

"Systems and methods for non-destructive inspection of semiconductor devices using reflective X-ray microscope tomographic imaging" was invented by Shogo Tomita (Yokkaichi, Japan), Tatsuya Hinoue (Yokkaichi, Japan) and Michiaki Sano (Yokkaichi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for non-destructive inspection of semiconductor devices, such as three-dimensional NAND memory device, using reflective X-ray microscope computed tomographic (CT) imaging. An X-ray microscope directs a focused beam of X-ray radiation at an oblique ang...