US Patent Issued to SAMSUNG ELECTRONICS on Sept. 30 for "Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,431,341, issued on Sept. 30, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method" was invented by Changsoon Lim (Hwaseong-si, South Korea), Youngdo Kim (Hwaseong-si, South Korea), Daewon Kang (Seoul, South Korea), Chansoo Kang (Hwaseong-si, South Korea), Kyunghyun Kim (Suwon-si, South Korea), Sangki Nam (Seongnam-si, South Korea), Kyunjin Lee (Suwon-si, South Korea), Sungho Jang (Suwon-si, South Korea) and Jonghun Pi (Gunwi-gun, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus includes first and second VI se...