US Patent Issued to SAMSUNG ELECTRONICS on Sept. 23 for "Apparatus for providing RF power and operating method thereof" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,412, issued on Sept. 23, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).

"Apparatus for providing RF power and operating method thereof" was invented by Siyoung Koh (Suwon-si, South Korea), Hadong Jin (Suwon-si, South Korea), Namkyun Kim (Suwon-si, South Korea), Seungbo Shim (Suwon-si, South Korea), Sungyong Lim (Suwon-si, South Korea) and Sungyeol Kim (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for providing radio frequency (RF) power includes a load having a process chamber, a RF power generator configured to provide the RF power through a cable electrically connected to the load, and a...