US Patent Issued to SAMSUNG ELECTRONICS on Oct. 7 for "Apparatus and method for inspecting semiconductor device" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,436,106, issued on Oct. 7, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Apparatus and method for inspecting semiconductor device" was invented by Hyunwoo Ryoo (Suwon-si, South Korea), Seulji Song (Suwon-si, South Korea), Minji Jeon (Suwon-si, South Korea), Hidong Kwak (Suwon-si, South Korea) and Jeongho Ahn (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor-device inspection apparatus includes a stage configured to allow a measurement target to be placed thereon, an actuator configured to move the stage in a vertical direction, a detector configured to detect a plurality of Raman spectra from s...