US Patent Issued to SAMSUNG ELECTRONICS on Oct. 28 for "Wafer cleaning equipment" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,456,633, issued on Oct. 28, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Wafer cleaning equipment" was invented by Yunseok Choi (Suwon-si, South Korea), Eunseok Lee (Suwon-si, South Korea), Seungri Ju (Suwon-si, South Korea), Yungjun Kim (Gyeonggi-do, South Korea), Jaehyun Sung (Suwon-si, South Korea) and Yongkyu Lee (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer cleaning equipment includes a vessel that includes a first inner wall, a second inner wall that faces the first inner wall, and a bottom connected to the first and second inner walls, a plurality of first nozzles disposed on the first inn...