US Patent Issued to SAMSUNG ELECTRONICS on Oct. 21 for "Inspection method, substrate processing method including the same, and substrate processing device using the substrate processing method" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,449,375, issued on Oct. 21, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Inspection method, substrate processing method including the same, and substrate processing device using the substrate processing method" was invented by Myunggeun Song (Suwon-si, South Korea), Sarah Kim (Suwon-si, South Korea), Changyul Kim (Suwon-si, South Korea), Younghoon Kim (Suwon-si, South Korea), Jaeyong Park (Suwon-si, South Korea), Sungil Cho (Suwon-si, South Korea) and Taeil Cho (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection method includes extracting a first similarity by comparing first data of a first opti...