ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,590, issued on Oct. 14, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).
"Plasma sensor module" was invented by Sungwon Cho (Suwon-si, South Korea), Dohoon Kwon (Suwon-si, South Korea), Kyunghyun Kim (Suwon-si, South Korea), Dougyong Sung (Suwon-si, South Korea), Jungmo Yang (Suwon-si, South Korea), Younseon Wang (Suwon-si, South Korea) and Younsok Choi (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma sensor module may include an upper substrate, a lower substrate, at least one probe and a printed circuit board (PCB). The upper substrate may be configured to be exposed to plasma. The lower substrate...