US Patent Issued to SAMSUNG ELECTRONICS on Nov. 4 for "Ultrapure water supplying apparatus, substrate processing system including the same, and processing substrate method using the same" (South Korean Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,459,844, issued on Nov. 4, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Ultrapure water supplying apparatus, substrate processing system including the same, and processing substrate method using the same" was invented by Dongcheol Kuk (Seoul, South Korea), Juhui Park (Hwaseong-si, South Korea), Seyoon Kim (Hwaseong-si, South Korea) and Jiyeon Lee (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An ultrapure water supplying apparatus may include an activated carbon filtering device, an ion exchange resin device connected to the activated carbon filtering device, a reverse osmotic membrane device connected ...