ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,482,690, issued on Nov. 25, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).
"Substrate processing apparatus" was invented by Youngbok Lee (Suwon-si, South Korea), Yihwan Kim (Suwon-si, South Korea), Seongkeun Cho (Suwon-si, South Korea) and Sangchul Han (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus includes a chamber providing a space where a semiconductor process is performed on a semiconductor substrate, a substrate plate configured to support the semiconductor substrate, the substrate plate having a central region and a peripheral region surrounding the central region, a c...