US Patent Issued to SAMSUNG ELECTRONICS on Nov. 18 for "Apparatus for cleaning a bowl and a photoresist (PR) coating system including the same" (South Korean Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,472,541, issued on Nov. 18, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Apparatus for cleaning a bowl and a photoresist (PR) coating system including the same" was invented by Kyoungwhan Oh (Hwaseong-si, South Korea), Jubong Lee (Hwaseong-si, South Korea) and Ansook Sul (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for cleaning a bowl includes a base plate, and a blade coupled to the base plate. The blade extends in a curve on a surface of the base plate in a direction receding from a center of the base plate in a plan view. An inner side surface of the blade includes a curved surface co...