ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,726, issued on Nov. 11, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Semiconductor processing device and semiconductor processing system" was invented by Hyunwoong Choi (Suwon-si, South Korea), Kongwoo Lee (Suwon-si, South Korea), Beomsoo Hwang (Suwon-si, South Korea), Myungki Song (Suwon-si, South Korea), Kyusang Lee (Suwon-si, South Korea) and Jinhyuk Choi (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor processing device includes a stage configured to receive a bare wafer placed thereon, a laser sensor located above the stage in a vertical direction, orthogonal to an upper surface of ...