US Patent Issued to SAMSUNG ELECTRONICS on May 27 for "Level sensor and substrate processing apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,313,393, issued on May 27, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Gyeonggi-do, South Korea).

"Level sensor and substrate processing apparatus including the same" was invented by Sungho Jang (Suwon-si, South Korea), Sangwoo Bae (Suwon-si, South Korea), Minhwan Seo (Suwon-si, South Korea), Jangwoon Sung (Suwon-si, South Korea), Akinori Okubo (Suwon-si, South Korea), Seungwoo Lee (Suwon-si, South Korea), Jungchul Lee (Suwon-si, South Korea), Jaehwang Jung (Suwon-si, South Korea) and Sangjoon Hong (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a level sensor configured to detect a height level of a substrate, and a...