US Patent Issued to SAMSUNG ELECTRONICS on May 20 for "Scanning electron microscope device, semiconductor manufacturing device, and method of controlling semiconductor manufacturing device" (South Korean Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,307,650, issued on May 20, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Gyeonggi-do, South Korea).

"Scanning electron microscope device, semiconductor manufacturing device, and method of controlling semiconductor manufacturing device" was invented by Yunje Cho (Seoul, South Korea), Subong Shon (Suwon-si, South Korea), Myungjun Lee (Seongnam-si, South Korea), Taehyoung Lee (Suwon-si, South Korea) and Yeny Yim (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A scanning electron microscope (SEM) device includes: an electron beam source configured to emit an electron beam; a lens unit disposed between the electron beam source and a stage ...