ALEXANDRIA, Va., June 12 -- United States Patent no. 12,298,676, issued on May 13, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (South Korea).
"Substrate processing apparatus" was invented by Injae Lee (Suwon-si, South Korea), Sungyong Bae (Suwon-si, South Korea), Daegeun Yoon (Suwon-si, South Korea), Inho Choi (Suwon-si, South Korea), Sunghyup Kim (Suwon-si, South Korea), Euishin Kim (Suwon-si, South Korea), Jeonggil Kim (Suwon-si, South Korea), Yebin Nam (Suwon-si, South Korea), Dongjin Lee (Suwon-si, South Korea), Jonggu Lee (Suwon-si, South Korea), Dohyun Jung (Suwon-si, South Korea) and Dongsik Jeong (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus i...