ALEXANDRIA, Va., June 12 -- United States Patent no. 12,298,671, issued on May 13, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Illumination correction apparatus" was invented by Donghyeong Kim (Suwon-si, South Korea), Eunhee Jeang (Suwon-si, South Korea), Teun Boeren (Suwon-si, South Korea), Yoonsang Lee (Suwon-si, South Korea), Jeonggil Kim (Suwon-si, South Korea) and Kyungbin Park (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An illumination correction apparatus for correcting a radiation beam incident on a reticle from an exposure apparatus includes a plurality of fingers each having a surface facing an incident direction of the radiation beam, the plural...