US Patent Issued to SAMSUNG ELECTRONICS on March 25 for "Apparatus and method of measuring uniformity based on pupil image and method of manufacturing mask by using the method" (South Korean Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,260,539, issued on March 25, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Apparatus and method of measuring uniformity based on pupil image and method of manufacturing mask by using the method" was invented by Minho Kim (Yongin-si, South Korea), Hakseung Han (Hwaseong-si, South Korea), Jiyoung Kim (Hwaseong-si, South Korea) and Jinback Park (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus and method of measuring pattern uniformity, and a method of manufacturing a mask by using the measurement method are provided. The measurement apparatus includes a light source configured to generate and o...