ALEXANDRIA, Va., March 19 -- United States Patent no. 12,255,110, issued on March 18, was assigned to SAMSUNG ELECTRONICS Co. Ltd..
"Methods and systems for real-time quality control of a film in a spin coating process" was invented by Gaurav Kumar (Bengaluru, India), Lakshmi Narayana Pedapudi (Bengaluru, India), Sameera Bharadwaja Hayavadana (Bengaluru, India), Sathyanarayanan Kulasekaran (Bengaluru, India), Shashank Shrikant Agashe (Bengaluru, India), Wan Sung Park (Seoul, South Korea) and Sung Ha Kim (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Example embodiments may provide methods for determining a quality of a film in spin coating process. The methods may include capturing ima...