US Patent Issued to SAMSUNG ELECTRONICS on March 18 for "Apparatus for and method of manufacturing semiconductor device" (South Korean Inventors)

ALEXANDRIA, Va., March 19 -- United States Patent no. 12,252,778, issued on March 18, was assigned to SAMSUNG ELECTRONICS CO LTD. (Suwon-si, South Korea).

"Apparatus for and method of manufacturing semiconductor device" was invented by Keewon Kim (Suwon-si, South Korea), Daehan Kim (Suwon-si, South Korea) and Minkyung Lee (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are an apparatus for and a method of manufacturing a semiconductor device. The apparatus includes a chamber, an evaporator that evaporates an organic source to provide a source gas on a substrate in the chamber, a vacuum pump that pumps the source gas and air from the chamber, an exhaust line between the vacuum ...