ALEXANDRIA, Va., June 18 -- United States Patent no. 12,325,916, issued on June 10, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Film forming apparatus" was invented by Hyunho Choi (Yongin-si, South Korea), Hyunsu Seol (Hwaseong-si, South Korea), Yoodong Yang (Hwaseong-si, South Korea) and Yujin Han (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A film forming apparatus including a bell-shaped chamber having an internal space and an exhaust port; a wafer boat in the bell-shaped chamber, and in which wafers are sequentially stackable from a lower end portion to an upper end portion; a gas supply pipe passing through the bell-shaped chamber to supply gas to t...