US Patent Issued to SAMSUNG ELECTRONICS on June 10 for "Apparatus for and method of manufacturing semiconductor device" (South Korean Inventors)

ALEXANDRIA, Va., June 18 -- United States Patent no. 12,327,710, issued on June 10, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Apparatus for and method of manufacturing semiconductor device" was invented by Jiye Kim (Suwon-si, South Korea), In Cheol Cheol Song (Hwaseong-si, South Korea), Woongpil Jeon (Jeju-si, South Korea), Daihong Kim (Suwon-si, South Korea), Jaebeom Park (Yongin-si, South Korea) and Byungho Chun (Seongnam-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for manufacturing a semiconductor device includes a chamber including a lower housing and an upper housing, heater chucks in the lower housing, shower heads on the heater chucks, the s...