US Patent Issued to SAMSUNG ELECTRONICS on July 29 for "Reticle having hexagonal patterns in a honeycomb arrangement" (South Korean Inventors)

ALEXANDRIA, Va., July 30 -- United States Patent no. 12,372,862, issued on July 29, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Reticle having hexagonal patterns in a honeycomb arrangement" was invented by Soeun Shin (Seongnam-si, South Korea) and Jin Choi (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A reticle includes a mask substrate, a reflective layer on the mask substrate, and a mask pattern on the reflective layer, the mask pattern having image patterns to absorb light, and first patterns between the image patterns, the first patterns being openings, the first patterns having a honeycomb arrangement, in a plan view, such that seven of the first patterns ...